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Stress measurements of germanium nanocrystals embedded in silicon oxide

✍ Scribed by Wellner, A.; Paillard, V.; Bonafos, C.; Coffin, H.; Claverie, A.; Schmidt, B.; Heinig, K. H.

Book ID: 120471675
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 203 KB
Volume: 94
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1617361

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