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Formation of nanocrystallites in amorphous silicon thin films

✍ Scribed by Olaf Schoenfeld; X. Zhao; T. Hempel; J. Blaesing; Y. Aoyagi; T. Sugano

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 254 KB
Volume: 142
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)90295-x

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