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Formation of impurity Si2OH6in silane synthesized from silicon tetrafluoride

✍ Scribed by A. D. Bulanov; P. G. Sennikov; A. Yu. Sozin; A. Yu. Lashkov; O. Yu. Troshin

Book ID
110182884
Publisher
SP MAIK Nauka/Interperiodica
Year
2011
Tongue
English
Weight
157 KB
Volume
56
Category
Article
ISSN
0036-0236

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πŸ“œ SIMILAR VOLUMES

On Chemical Kinetics of Silicon Depositi
On Chemical Kinetics of Silicon Deposition from Silane (V) The Effect of Hydrogen Formation
✍ Dr. sc. H. KΓΌhne πŸ“‚ Article πŸ“… 1991 πŸ› John Wiley and Sons 🌐 English βš– 414 KB

In consequence of hydrogen formation during silane pyrolysis total gas volume increases, when the reaction proceeds at constant total pressure. Any mole of silane decomposed produces two moles of hydrogen. In the present paper expressions are derived for 1' ' and 0.5Ih reaction order describing axia