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Formation of dry etched gratings in GaN and InGaN

✍ Scribed by J. W. Lee; J. Hong; J. D. Mackenzie; C. R. Abernathy; S. J. Pearton; F. Ren; P. F. Sciortino

Book ID: 107457537
Publisher: Springer US
Year: 1997
Tongue: English
Weight: 824 KB
Volume: 26
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-997-0166-9

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