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Formation and crystallization of silicon nanoclusters in SiNx:H films using femtosecond pulsed laser annealings

✍ Scribed by T. T. Korchagina; V. A. Volodin; B. N. Chichkov

Book ID: 111444804
Publisher: Springer
Year: 2010
Tongue: English
Weight: 215 KB
Volume: 44
Category: Article
ISSN: 1063-7826
DOI: 10.1134/s1063782610120146

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