Femtosecond-laser-induced delamination and blister formation in thermal oxide films on silicon (100)

✍ Scribed by McDonald, Joel P.; Mistry, Vanita R.; Ray, Katherine E.; Yalisove, Steven M.; Nees, John A.; Moody, Neville R.

• Book ID: 126884957
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 468 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2193777