Femtosecond laser induced formation of Si nanocrystals and amorphous Si clusters in silicon-rich nitride films

✍ Scribed by V.A. Volodin; T.T. Korchagina; J. Koch; B.N. Chichkov

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 260 KB
• Volume: 42
• Category: Article
• ISSN: 1386-9477
• DOI: 10.1016/j.physe.2009.12.034