✦ LIBER ✦
Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing
✍ Scribed by Kyung Min Ahn; Seung Mo Kang; Byung Tae Ahn
- Book ID
- 118426817
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 807 KB
- Volume
- 12
- Category
- Article
- ISSN
- 1567-1739
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