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Formation and annealing of periodically arranged amorphous SiCx nanoclusters in silicon

✍ Scribed by J.K.N Lindner; M Häberlen; M Schmid; W Attenberger; B Stritzker

Book ID: 114165206
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 274 KB
Volume: 186
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00922-3

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