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X-ray-diffraction study of crystalline Si nanocluster formation in annealed silicon-rich silicon oxides

✍ Scribed by Comedi, D.; Zalloum, O. H. Y.; Irving, E. A.; Wojcik, J.; Roschuk, T.; Flynn, M. J.; Mascher, P.

Book ID: 120424213
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 393 KB
Volume: 99
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2162989

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