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Focused, rasterable, high-energy neutral molecular beam probe for secondary ion mass spectrometry

โœ Scribed by Appelhans, Anthony D.; Delmore, James E.; Dahl, David A.


Book ID
120606569
Publisher
American Chemical Society
Year
1987
Tongue
English
Weight
906 KB
Volume
59
Category
Article
ISSN
0003-2700

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A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values