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Focused ion beam machining and deposition for nanofabrication

✍ Scribed by ST Davies; B Khamsehpour

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 949 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(95)00235-9

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