Study of the Chemical Composition and Mi
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Baker, M. A.; Hammer, P.
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Article
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1997
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John Wiley and Sons
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English
⚖ 496 KB
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The chemical composition and microstructure of dual ion beam-deposited Ðlms with nitrogen contents in the CN x range 20-33 at.% have been examined by Fourier transform infrared spectroscopy (FTIR) and x-ray photoelectron spectroscopy (XPS). The FTIR spectra together with other published data have be