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Focused ion beam machined nanostructures depth profiled by macrochannelling ion beam analysis

✍ Scribed by S.M. Orbons; L. van Dijk; M. Bozkurt; P.N. Johnston; P. Reichart; D.N. Jamieson

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 784 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.03.179

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The combination of focused ion beam (FIB) milling and Ðeld emission scanning electron microscopy (SEM) with x-ray energy-dispersive spectroscopy (EDS) makes possible high-spatial-resolution (AE1 lm) element-speciÐc depth proÐling. The depth proÐle resolution is controlled via the FIB to AE 5 nm sput