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Fluorocarbon Resist for High-Speed Scanning Probe Lithography

✍ Scribed by Marco Rolandi; Itai Suez; Andreas Scholl; Jean M. J. Fréchet

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 337 KB
Volume: 46
Category: Article
ISSN: 0044-8249
DOI: 10.1002/anie.200701496

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