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Dendrimer-Based Self-Assembled Monolayers as Resists for Scanning Probe Lithography

✍ Scribed by David C. Tully; Kathryn Wilder; Jean M. J. Fréchet; Alexander R. Trimble; Calvin F. Quate


Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
376 KB
Volume
11
Category
Article
ISSN
0935-9648

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## Abstract We report the development of laser‐scanning lithography (LSL), which employs a laser‐scanning confocal microscope to pattern photoresists that can be utilized, for example, in the fabrication of masters for use in soft lithography. This convenient technique provides even exposure across