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Scanning Probe Lithography Using Self-Assembled Monolayers

✍ Scribed by Stephan Kraemer; Ryan R. Fuierer; Christopher B. Gorman


Publisher
John Wiley and Sons
Year
2004
Weight
51 KB
Volume
35
Category
Article
ISSN
0931-7597

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## Abstract We report the development of laser‐scanning lithography (LSL), which employs a laser‐scanning confocal microscope to pattern photoresists that can be utilized, for example, in the fabrication of masters for use in soft lithography. This convenient technique provides even exposure across