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Fluence dependent concentration of low-energy Ga implanted in Si

✍ Scribed by H. Gnaser; J. Steltmann; H. Oechsner; J. Steltmann; H. Oechsner

Book ID: 113284634
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 306 KB
Volume: 80-81
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)96087-s

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