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Fixed-angle, energy-dispersive x-ray reflectivity measurement of thin tantalum film thickness

✍ Scribed by D. Windover; E. Barnat; J. Summers; T. -M. Lu; A. Kumar; H. Bakhru; S. L. Lee


Book ID
107452845
Publisher
Springer US
Year
2002
Tongue
English
Weight
255 KB
Volume
31
Category
Article
ISSN
0361-5235

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