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Thickness control of InP and In0.53 Ga0.47 As thin films by energy-dispersive X-ray spectrometry

✍ Scribed by E. Peiner; K. Hansen; A. Schlachetzki

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 805 KB
Volume: 256
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)06283-8

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