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FIB-induced damage in silicon

✍ Scribed by S. RUBANOV; P. R. MUNROE

Book ID: 110735896
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 209 KB
Volume: 214
Category: Article
ISSN: 0022-2720
DOI: 10.1111/j.0022-2720.2004.01327.x

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