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Damage induced in silicon by backscattered electrons

✍ Scribed by S.D. Dhole; V.N. Bhoraskar

Book ID: 113284340
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 265 KB
Volume: 73
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95746-r

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