✦ LIBER ✦
Photochemical fine etching using FIB-induced damage in GaAs for in-situ dry processing
✍ Scribed by H. Arimoto; M. Kosugi; H. Kitada; E. Miyauchi
- Book ID
- 107920385
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 384 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0167-9317
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