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Features of the formation of porous alumina mask for local plasma etching of semiconductors

✍ Scribed by A. N. Belov; S. A. Gavrilov; Yu. A. Demidov; V. I. Shevyakov


Book ID
114994433
Publisher
SP MAIK Nauka/Interperiodica
Year
2011
Tongue
English
Weight
625 KB
Volume
6
Category
Article
ISSN
1995-0780

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