✦ LIBER ✦
MeV Si ion beam implantation as an effective patterning tool for the localized formation of porous silicon
✍ Scribed by E. Punzón-Quijorna; V. Torres-Costa; M. Manso-Silván; R.J. Martín-Palma; A. Climent-Font
- Book ID
- 113823660
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 474 KB
- Volume
- 282
- Category
- Article
- ISSN
- 0168-583X
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