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Thermal dewetting of Pt thin film: Etch-masks for the fabrication of semiconductor nanostructures

✍ Scribed by Ji-Myon Lee; Byung-Il Kim

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 890 KB
Volume: 449-451
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2006.02.403

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