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Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers

✍ Scribed by C. Millon; C. Malhaire; C. Dubois; D. Barbier

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 398 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00081-1

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