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Employing Thin-Film Delamination for the Formation of Shadow Masks for Nanostructure Fabrication

✍ Scribed by M. Elbahri; S. K. Rudra; S. Wille; S. Jebril; M. Scharnberg; D. Paretkar; R. Kunz; H. Rui; A. Biswas; R. Adelung

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 330 KB
Volume: 18
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.200502187

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