Surface planarization of ZnO thin film f
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Woo-Sun Lee; Gwon-Woo Choi; Yong-Jin Seo
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Article
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2009
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Elsevier Science
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English
⚖ 543 KB
In this paper, surface morphology and optical properties are investigated to find the optimum microstructure of zinc oxide (ZnO) thin films deposited by radio frequency (RF) magnetron sputtering. To achieve a high transmittance and a low resistivity, we examined various film deposition conditions. T