Electroplated Ni mask for plasma etching of submicron-sized features in LiNbO3

✍ Scribed by Lecestre, Aurélie; Benchabane, Sarah; Robert, Laurent; Salut, Roland; Ulliac, Gwenn; Blind, Pascal

• Book ID: 120561322
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 654 KB
• Volume: 105
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.08.004