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Failure of aluminium contacts to silicon in shallow diffused transistors

✍ Scribed by J. McCarthy


Publisher
Elsevier Science
Year
1970
Tongue
English
Weight
148 KB
Volume
9
Category
Article
ISSN
0026-2714

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In this work the effect of aluminium treatment on the material and device properties of highly disordered multicrystalline silicon wafers is analysed using the light beam induced current method at different wavelengths. The results show an improvement of the diffusion length L measured on samples su