✦ LIBER ✦
A TaSix barrier for low resistivity and high reliability of contacts to shallow diffusion regions in silicon
✍ Scribed by F. Neppl; F. Fischer; U. Schwabe
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 806 KB
- Volume
- 120
- Category
- Article
- ISSN
- 0040-6090
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