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Fabrication of ultra-thin strained silicon on insulator

✍ Scribed by T. S. Drake; C. Ní Chléirigh; M. L. Lee; A. J. Pitera; E. A. Fitzgerald; D. A. Antoniadis; D. H. Anjum; J. Li; R. Hull; N. Klymko; J. L. Hoyt

Publisher
Springer US
Year
2003
Tongue
English
Weight
777 KB
Volume
32
Category
Article
ISSN
0361-5235

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