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Fabrication of transition metal nitride films using a shock wave plasma

✍ Scribed by Toshiro Endo; Hiromich Ezumi; Hikaru Yamada; Kaizo Kuwahara; Takao Kino

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 202 KB
Volume: 163
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90428-2

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