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Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography

✍ Scribed by Choi, Yang-Kyu; Zhu, Ji; Grunes, Jeff; Bokor, Jeffrey; Somorjai, Gabor. A.

Book ID: 120474698
Publisher: American Chemical Society
Year: 2003
Tongue: English
Weight: 190 KB
Volume: 107
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp0222649

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