Silicon nanowires with sub 10 nm lateral dimensions: From atomic force microscope lithography based fabrication to electrical measurements

✍ Scribed by Legrand, B.; Deresmes, D.; Stiévenard, D.

• Book ID: 121235703
• Publisher: AVS (American Vacuum Society)
• Year: 2002
• Tongue: English
• Weight: 909 KB
• Volume: 20
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.1470519