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Fabrication of silicon nanowires

✍ Scribed by J.L. Liu; Y. Lu; Y. Shi; S.L. Gu; R.L. Jiang; F. Wang; Y.D. Zheng

Publisher
Springer
Year
1998
Tongue
English
Weight
258 KB
Volume
66
Category
Article
ISSN
1432-0630

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## Abstract Ultra thin (8 nm) silicon nanowires have been fabricated by Atomic Force Microscopy (AFM) lithography on an insulator layer starting from Silicon On Insulator (SOI) substrates. Electrical measurements reveal a high sensitivity of the electron transport in these ultra thin wires to the c