Pattern transfer optimization for the fabrication of arrays of silicon nanowires

✍ Scribed by Yamane Gebremichael; Ana Sánchez; Xavier Borrise; Malte Schmidt; Alejandro R. Goñi; M. Isabel Alonso; Ricardo Rurali; Jordi Suñé; Xavier Cartoixa; Francesc Pérez-Murano

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 334 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.086