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Fabrication of Si nano-wires using anisotropic dry and wet etching

โœ Scribed by P. Normand; D. Tsoukalas; C. Aidinis; A. Tserepi; D. Kouvatsos; E. Kapetanakis


Book ID
114155854
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
231 KB
Volume
41-42
Category
Article
ISSN
0167-9317

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