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Fabrication of metal nano dot dry etching mask using block copolymer thin film

✍ Scribed by G.B. Kang; S.-I. Kim; Y.T. Kim; J.H. Park

Book ID: 108079157
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 354 KB
Volume: 9
Category: Article
ISSN: 1567-1739
DOI: 10.1016/j.cap.2008.08.012

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