✦ LIBER ✦
Use of lithographically defined metal masks in selective chemical etching of patterns in thin films: microelectronic applications
✍ Scribed by Jamal Khan
- Book ID
- 118367498
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 844 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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