✦ LIBER ✦
Nanofabrication of quantum wires on (100) Si and SiGe by shifted-resist pattern and anisotropic wet etching
✍ Scribed by E. Giovine; E. Cianci; V. Foglietti; A. Notargiacomo; F. Evangelisti
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 769 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0167-9317
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