Fabrication of Si MOSFET's Using Neutron-Irradiated Silicon as Semi-Insulating Substrate

✍ Scribed by Vu Quoc Ho; Sugano, T.

• Book ID: 119798110
• Publisher: IEEE
• Year: 1982
• Tongue: English
• Weight: 794 KB
• Volume: 17
• Category: Article
• ISSN: 0018-9200
• DOI: 10.1109/jssc.1982.1051702