IIB-7 Fabrication of Si-gate MOSFET's on a Silicon-on-insulator formed by lateral solid phase epitaxy

✍ Scribed by Katoh, T.; Hirashita, N.; Sasaki, M.; Onoda, H.

• Book ID: 114595761
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 156 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22772