IIIB-4 fabrication of Si-MOSFET using NTD silicon as the semi-insulating substrate

✍ Scribed by Ho, V.Q.; Sugano, T.

• Book ID: 114593901
• Publisher: IEEE
• Year: 1981
• Tongue: English
• Weight: 186 KB
• Volume: 28
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1981.20545