Fabrication of Si MOSFET's using neutron-irradiated Silicon as semi-insulating substrate

✍ Scribed by Vu Quoc Ho; Sugano, T.

• Book ID: 114594048
• Publisher: IEEE
• Year: 1982
• Tongue: English
• Weight: 503 KB
• Volume: 29
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1982.20730