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Fabrication of planar nanofluidic channels in thermoplastic polymers by O2 plasma etching

✍ Scribed by Junshan Liu; Hongchao Qiao; Zheng Xu; Chong Liu; Junyao Wang; Liqun Du; Xi Zhang; Liding Wang

Book ID
114461773
Publisher
The Institution of Engineering and Technology
Year
2012
Tongue
English
Weight
327 KB
Volume
7
Category
Article
ISSN
1750-0443

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