✦ LIBER ✦
The SOI planar photonic crystal fabrication: patterning of Cr using Cl2/O2 plasma etching
✍ Scribed by A.P. Milenin; C. Jamois; R.B. Wehrspohn; M. Reiche
- Book ID
- 108207378
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 316 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.