Fabrication of low-loss channel waveguides in Al2O3and Y2O3layers by inductively coupled plasma reactive ion etching

✍ Scribed by J.D.B. Bradley; F. Ay; K. Wörhoff; M. Pollnau

• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 428 KB
• Volume: 89
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/s00340-007-2815-3