Side-wall roughness in SOI rib waveguides fabricated by inductively coupled plasma reactive ion etching

✍ Scribed by Y. Wang; Z. Lin; J. Zhang; X. Cheng; F. Zhang

• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 175 KB
• Volume: 79
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/s00340-004-1648-6